Technical Specifications
| Parameter Name | Parameter Value |
|---|---|
| Product Model | 852B-13384 |
| Manufacturer | MKS Instruments |
| Product Type | Baratron® Absolute Pressure Transducer (Capacitance Diaphragm Gauge) |
| Series | Baratron® 852B |
| Measurement Range | 0 to ~13,384 Pa (0 to ~100 Torr) |
| Accuracy | ±0.1% of Full Scale (typical specification) |
| Measurement Principle | Capacitance diaphragm (gas-composition independent) |
| Response Time | ≤ 1 ms (typical) |
| Operating Temperature | -20°C to +85°C (standard range; consult factory for extended options) |
| Supply Voltage | 12 VDC ±10% or 24 VDC (configuration dependent) |
| Output Signal | 4–20 mA or 0–10 VDC (model-dependent) |
| Process Connection | 1/8″ NPT or KF flange (configuration specific) |
| Electrical Interface | M12 connector or industry-standard connector |
| Wetted Materials | Stainless steel with PTFE diaphragm |
| Environmental Protection | IP65 or higher |
Main Features and Advantages
Gas-Composition Independence: Unlike Pirani or thermocouple gauges that infer pressure from thermal conductivity, the 852B-13384 measures pressure directly via a capacitive diaphragm sensor. This means the 852B-13384 delivers accurate readings whether the chamber contains argon, oxygen, nitrogen, or a corrosive process gas mixture. For multi-step semiconductor processes, this eliminates the need for gas-specific correction factors and simplifies recipe portability across tools.
All-Welded Sensor Construction: The 852B-13384 features an all-welded, hermetically sealed sensor assembly that removes elastomer O-rings from the wetted path. This design choice directly addresses the outgassing and virtual leak concerns that plague vacuum processes where trace moisture or hydrocarbon contamination can degrade film quality or extend pump-down times. The 852B-13384 therefore contributes to faster pump-down cycles and more consistent base pressure performance.
Fast, Stable Response for Closed-Loop Control: With a response time measured in milliseconds, the 852B-13384 provides the bandwidth required for aggressive pressure control loops. Throttle valve controllers can react to process transients without the lag that plagues slower thermal-based gauges. The capacitance sensor’s inherent stability also reduces calibration frequency, lowering maintenance burden and extending the service interval for the 852B-13384 in production environments.
